Micromechanical Resonators

These resonators, which operate through thermal-piezoresistive transduction, are smaller, more integrated and higher resolution replacements for traditional piezoelectric mechanical resonant sensors. The temperature instability of silicon has been a drawback to its use, but this patent allows for fine tuning of the resonator’s stability by changing the operating bias current and doping the actuator beams. The resonator is also capable of absorbing DC current from a source and acting as an AC energy pump to initiate and sustain its own mechanical oscillations through a feedback loop of expansion and contraction. CeCe Ging techtransfer@du.edu 303-871-4230