Process of Production of Roll and Submicrometric Membrane of Ga2O3 by Ion Implantation

Instituto Superior Técnico Background
The process of producing rolls and submicron membranes from monocrystalline materials has been extensively studied and developed in recent years due to its technological potential in different electronic, optical, and mechanical applications. Most of the technologies developed need to use a sacrificial layer to obtain thin layers/membranes of a dielectric, semiconductor, or conductive material from block material. The use of a sacrificial layer condition even makes it impossible to obtain high quality monocrystalline layers/membranes.
Technology Overview
The present invention provides a method of manufacturing thin monocrystalline conductive, semiconducting, and insulating layers/membranes by introducing a strain profile in materials with easy cleavage planes. The method consists of implanting ions in a semiconductor monocrystal of Ga2O3, with a cleavage plane parallel to the surface, along a direction not parallel to this cleavage plane, which makes it possible to create at least one roll. The next step of the method involves subjecting a roll, formed in the previous step, to a heat treatment at a temperature equal to or greater than 500º C. This releases the strain and unrolls the roll to form a membrane with submicrometric thickness.
Development Status:

Technology Readiness Level (TRL): 3;

Benefits

Makes it possible to have conductive, semiconductor, or dielectric monocrystalline membranes with a new method that bypasses the existing smart-cut method;
No need to use a sacrificial layer to obtain thin layers/membranes of a dielectric, semiconductor, or conductive material from a block material.

Applications

Monocrystalline membranes for the development of transparent detectors of ionizing radiation;
Flexible monocrystalline substrate for the development of different mechanical, optical, electrical sensors and micro-electro-optomechanical systems;
Thin flexible monocrystalline membranes for the development of windows transparent to UV/visible radiation and ionizing radiation;
Flexible monocrystalline base substrate for epitaxial deposition;
Tubular monocrystalline optical micro-cavities;
Micro-heaters;
Membrane transfer to another substrate.

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